Sensor technology
Principles of electronic pressure measurement
Pressure is a mechanical measurand. In order to process this in automation technology, it needs to be converted into an electrical signal. To do this, different physical effects are used which result from the deformability of different materials due to the pressure applied. There is a distinction between the following principles:

There is a distinction between the following principles:

  • Resistive measurement method – resistance change due to expansion or compression
  • Capacitive measurement method – capacitive change due to the plate distance
  • Inductive measurement method – inductive change due to the distance from a ferrite plate to the coil
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Metallische Dehnungsmessstreifen (DMS)
Metallische DMS sind fest mit einer Membran verbundene, elektrische Widerstände. Der Widerstandswert verändert sich mit ihrer Dehnung und Stauchung.
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Mehr zum resistiven Messverfahren mit DMS
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Keramik-Dickschicht-Sensor
Keramik-Dickschicht-Sensoren
Auf der druckabgewandten Seite der Membran dieser Sensoren werden im Siebdruckverfahren die Dehnungsmessstreifen als Dickschicht-Widerstandspaste aufgebracht.
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Mehr zu Keramik-Dickschicht-Sensoren
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Bondierter Siliziumchip für piezoresistive Druckmessung
Piezoresistive Siliziumsensoren
Hier besteht das druckempfindliche Element aus einem mehrere Millimeter großen Siliziumchip. Im Vergleich zu Dehnungsmessstreifen aus Metall reagieren Halbleiter-Dehnungsmessstreifen 100 Mal schneller.
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Mehr über piezo-resistive Siliziumsensoren
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Kapazitiver Keramiksensor
Im Gegensatz zu den resistiven Verfahren wird nicht die Verformung selbst, sondern eine Distanzänderung ausgewertet, die aus der Verformung der Membran resultiert.
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Mehr zum kapizativen Messverfahren
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Induktive Sensoren
Hier wird die Änderung der Induktivität ausgewertet. Diese entsteht durch einem Ferritplättchen auf der Membran, dass sich bei Druckänderung zwischen 2 Spulen bewegt.
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Mehr zum induktiven Messverfahren
The sensing element, which converts the pressure into an electrical signal using one of the methods listed above, is generally referred to as a sensor or sensor element. The raw signal of the sensors is not yet suitable for processing in an evaluation unit, such as a controller or a PLC. It is too small and too prone to failure. It is also not usually linearly proportional to the pressure applied and is sensitive to temperature influences. The signal must therefore be processed by a subsequent electronics unit in order to be available at the output as a standard signal. Furthermore, the sensor requires a housing, an electrical connection, and a suitable process connection that can be used to mount it at the measuring point. It is only referred to as a pressure transmitter in this finished expansion stage.
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Fig. 1 Sectional view of OEM pressure transmitter JUMO MIDAS SI
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